Airflow Sensors AWM40000 Series Microbridge Mass Airflow/Unamplified and Amplified Figure 1 Heater Control Circuit FEATURES (cid:49) Manifold mount/o-ring sealed (cid:49) Ceramic flow-tube (non-outgassing), 0-1000 sccm (cid:49) Plastic flow tube, 0-6 SLPM (cid:49) High common mode pressure (150 psi ceramic flow-tube only) (cid:49) Operating temperature up to 125(cid:176) C Figure 2 (unamplified only) Sensing Bridge Supply Circuit (cid:49) High stability at null and full-scale The AWM40000 Series mass flow sensor family is based on proven microbridge technology and includes both amplified signal conditioned devices and unampli- fied sensor only devices. When using the unamplified devices (AWM42150VH and AWM42300V), the heater control circuit in Figure 1and the sensing bridge supply circuit in Figure 2 Figure 3 are both required for operation per speci- Differential Instrumentation Amplifier Circuit fication. These two circuits are NOT on board the sensor and must be supplied in the application. The differential amplifier circuitry in Figure 3 may be useful in pro- viding output gain and/or introducing voltage offsets to the sensor output (Ref. Equation 1). The amplified devices (AWM43300V and AWM43600V) can be used to increase output gain and introduce voltage offsets. The differential instrumentation amplifier circuitry, heater control circuitry and sensing bridge supply circuitry are all provided onboard the amplified sensors. Equation 1: ( )( )( ) 2R+R R V(cid:74) 2 1 4 V-V +V offset o R R 2 1 1 3 ( ) R 6 where V offset(cid:74)V S R R 6+ 5 76 Honeywell(cid:49)Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada

Airflow Sensors AWM40000 Series Microbridge Mass Airflow/Unamplified and Amplified AWM40000 SERIES ORDER GUIDE (Performance Characteristics @10.01±0.01VDC, 25(cid:176) C) Catalog Listings AWM42150VH AWM42300V AWM43300V AWM43600V Flow Range (Full Scale) ±25 sccm ±1000 sccm +1000 sccm +6 SLPM Output Voltage @ Trim Point 8.5 mV ±1.5 mV 54.7 mV ±3.7 mV DC 5 V ±0.15 VDC 5 V ±0.15 VDC @ 6 SLPM @ 25 sccm @ 1000 sccm @ 1000 sccm Null Voltage 0.0 ±1.0 mVDC 0.0 ±1.5 mVDC 1.0 ±0.05 VDC 1.0 ±0.05 VDC Null Voltage Shift +25(cid:176) to −25(cid:176) C, +25(cid:176) to +85(cid:176) C ±0.20 mVDC ±0.20 mVDC ±0.025 VDC ±0.025 VDC Output Voltage Shift +25(cid:176) to −25(cid:176) C +2.5% Reading typ. +2.5% Reading max. −5.0% Reading max. −6.0% Reading max. +25(cid:176) to +85(cid:176) C −2.5% Reading typ. −2.5% Reading max. +6.0% Reading max. +6.0% Reading max. Power Consumption (mW) 60 (Max.) 60 (Max.) 60 (Max.) 75 (Max.) Repeatability & Hysteresis ±0.35% Reading (3) ±0.50% Reading ±0.50% Reading ±1.00% Reading Pressure Drop @ Full Scale (in HO) 0.008(cid:78)HO (Typ.) 1.02 (Typ.) 1.02 (Typ.) 8.00 (Typ.) 2 2 Min. Typ. Max. Excitation VDC 8.0 10±0.01 15 Response Time (msec) — 1.0 3.0 (Note 1) Common Mode Pressure (psi) (max.) — — 150 psi (10 Bar) 25 psi (1.7 Bar) Output Load NPN (Sinking): 10 mA PNP (Sourcing): 20 mA Temperature Range Operating: −40(cid:176) to +125(cid:176) C (−40(cid:176) to +251(cid:176) F) Operating: −25(cid:176) to +85(cid:176) C (−13(cid:176) to +185(cid:176) F) Storage: −40(cid:176) to +125(cid:176) C (−40(cid:176) to +251(cid:176) F) Storage: −40(cid:176) to +90(cid:176) C (−40(cid:176) to +194(cid:176) F) Calibration Gas Nitrogen Ratiometricity Error ±0.30% Reading Weight (grams) 14 g 11 g Shock Rating 100 g peak (5 drops, 6 axes) Termination 2,54 mm (.100(cid:78)) centers, 0,635 cm (0.025(cid:78)) square Notes: A 1. Response time is typically 1msec from 10 to 90%. ir 2. Repeatability & Hysteresis tolerances reflect inherent inaccuracies of the measurement equipment. flo 3. Maximum allowable rate of flow change to prevent damage: 5.0 SLPM/1.0 sec. w MOUNTING DIMENSIONS (for reference only) Amplified Sensors Unamplified Sensors Note: Positive flow direction is defined as proceeding from Port 1(P1) to Port 2 (P2), and results in positive output. Honeywell(cid:49) Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada 77

Airflow Sensors AWM40000 Series Microbridge Mass Airflow/Unamplified and Amplified OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) Performance Characteristics @ 10.0 ±0.01VDC, 25(cid:176) C AWM42150VH AWM42300V AWM43300V AWM43600V Press Flow Nom. Tol. Press. Flow Nom. Tol. Press. Flow Nom. Tol. Press. Flow Nom. Tol. (cid:109)Bar sccm mV ±mV mBar sccm mV ±mV mBar sccm VDC ±VDC mBar SLPM VDC ±VDC 20 30 9.9 1.5 2.23 1000 54.7 2.00 2.23 1000 5.00 0.15 20.0 6 5.00 0.15 17 25 8.5 1.5 1.52 800 53.0 2.0 1.87 900 4.97 0.16 14.7 5 4.89 0.20 14 20 6.8 1.5 0.94 600 49.3 2.5 1.52 800 4.89 0.17 9.07 4 4.70 0.25 10 15 5.2 1.0 0.49 400 42.5 3.5 1.16 700 4.78 0.18 6.40 3 4.40 0.35 7 10 3.5 1.0 0.19 200 29.8 4.0 0.94 600 4.63 0.19 3.35 2 3.80 0.30 3 5 1.7 1.0 0.00 0 0.0 1.5 0.71 500 4.43 0.20 1.17 1 3.10 0.30 0 0 0.0 1.0 -0.19 -200 -29.8 4.0 0.50 400 4.15 0.21 0.00 0 1.00 0.05 -0.49 -400 -42.5 5.0 0.33 300 3.76 0.19 -0.94 -600 -49.3 6.0 0.19 200 3.23 0.17 -1.52 -800 -53.0 6.0 0.08 100 2.49 0.14 -2.23 -1000 -55.2 6.0 0.00 0 1.00 0.05 Notes: 1. Numbers in BOLD type indicate calibration type, mass flow or differential pressure. Tolerance values apply to calibration type only. 78 Honeywell(cid:49) Sensing and Control(cid:49)1-800-537-6945 USA(cid:49)(cid:70)1-815-235-6847 International(cid:49)1-800-737-3360 Canada