Small, Low Power, 3-Axis ±16 g Accelerometer ADXL326 FEATURES GENERAL DESCRIPTION 3-axis sensing The ADXL326 is a small, low power, complete 3-axis Small, low profile package accelerometer with signal conditioned voltage outputs. The 4 mm × 4 mm × 1.45 mm LFCSP product measures acceleration with a minimum full-scale range Low power: 350 μA typical of ±16 g. It can measure the static acceleration of gravity in tilt- Single-supply operation: 1.8 V to 3.6 V sensing applications, as well as dynamic acceleration, resulting 10,000 g shock survival from motion, shock, or vibration. Excellent temperature stability The user selects the bandwidth of the accelerometer using Bandwidth adjustment with a single capacitor per axis the C , C , and C capacitors at the X , Y , and Z pins. X Y Z OUT OUT OUT RoHS/WEEE lead-free compliant Bandwidths can be selected to suit the application with a range of 0.5 Hz to 1600 Hz for X and Y axes and a range of APPLICATIONS 0.5 Hz to 550 Hz for the Z axis. Cost-sensitive, low power, motion- and tilt-sensing applications The ADXL326 is available in a small, low profile, 4 mm × Mobile devices 4 mm × 1.45 mm, 16-lead, plastic lead frame chip scale package Gaming systems (LFCSP_LQ). Disk drive protection Image stabilization Sports and health devices FUNCTIONAL BLOCK DIAGRAM +3V VS ADXL326 ~32kΩ XOUT OUTPUT AMP 3-AXIS CX SENSOR ~32kΩ YOUT CDC AC AMP DEMOD OUTPUT AMP CY ~32kΩ ZOUT OUTPUT AMP CZ COM ST 07948-001 Figure 1. Rev. 0 Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Tel: 781.329.4700 www.analog.com Trademarks and registered trademarks are the property of their respective owners. Fax: 781.461.3113 ©2009 Analog Devices, Inc. All rights reserved.

ADXL326 TABLE OF CONTENTS Features .............................................................................................. 1  Performance ................................................................................ 10  Applications ....................................................................................... 1  Applications Information .............................................................. 11  General Description ......................................................................... 1  Power Supply Decoupling ......................................................... 11  Functional Block Diagram .............................................................. 1  Setting the Bandwidth Using C , C , and C .......................... 11  X Y Z Revision History ............................................................................... 2  Self Test ........................................................................................ 11  Specifications ..................................................................................... 3  Design Trade-Offs for Selecting Filter Characteristics: The Absolute Maximum Ratings ............................................................ 4  Noise/BW Trade-Off .................................................................. 11  ESD Caution .................................................................................. 4  Use with Operating Voltages Other Than 3 V .......................... 11  Pin Configuration and Function Descriptions ............................. 5  Axes of Acceleration Sensitivity ............................................... 12  Typical Performance Characteristics ............................................. 6  Layout and Design Recommendations ................................... 13  Theory of Operation ...................................................................... 10  Outline Dimensions ....................................................................... 14  Mechanical Sensor ...................................................................... 10  Ordering Guide .......................................................................... 14  REVISION HISTORY 8/09—Revision 0: Initial Version Rev. 0 | Page 2 of 16

ADXL326 SPECIFICATIONS T = 25°C, V = 3 V, C = C = C = 0.1 μF, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are A S X Y Z guaranteed. Typical specifications are not guaranteed. Table 1. Parameter Conditions Min Typ Max Unit SENSOR INPUT Each axis Measurement Range ±16 ±19 g Nonlinearity Percent of full scale ±0.3 % Package Alignment Error ±1 Degrees Interaxis Alignment Error ±0.1 Degrees Cross Axis Sensitivity1 ±1 % SENSITIVITY (RATIOMETRIC)2 Each axis Sensitivity at X , Y , Z V = 3 V 51 57 63 mV/g OUT OUT OUT S Sensitivity Change Due to Temperature3 V = 3 V ±0.01 %/°C S ZERO g BIAS LEVEL (RATIOMETRIC) 0 g Voltage at X , Y V = 3 V 1.35 1.5 1.65 V OUT OUT S 0 g Voltage at Z V = 3 V 1.2 1.5 1.8 V OUT S 0 g Offset vs. Temperature ±1 mg/°C NOISE PERFORMANCE Noise Density X , Y , Z 300 μg/√Hz rms OUT OUT OUT FREQUENCY RESPONSE4 Bandwidth X , Y 5 No external filter 1600 Hz OUT OUT Bandwidth Z 5 No external filter 550 Hz OUT R Tolerance 32 ± 15% kΩ FILT Sensor Resonant Frequency 5.5 kHz SELF TEST6 Logic Input Low +0.6 V Logic Input High +2.4 V ST Actuation Current +60 μA Output Change at X Self test 0 to 1 −29 −62 −114 mV OUT Output Change at Y Self test 0 to 1 +29 +62 +114 mV OUT Output Change at Z Self test 0 to 1 +29 +105 +190 mV OUT OUTPUT AMPLIFIER Output Swing Low No load 0.1 V Output Swing High No load 2.8 V POWER SUPPLY Operating Voltage Range 1.8 3.6 V Supply Current V = 3 V 350 μA S Turn-On Time7 No external filter 1 ms TEMPERATURE Operating Temperature Range −40 +85 °C 1 Defined as coupling between any two axes. 2 Sensitivity is essentially ratiometric to VS. 3 Defined as the output change from ambient-to-maximum temperature or ambient-to-minimum temperature. 4 Actual frequency response controlled by user-supplied external filter capacitors (CX, CY, CZ). 5 Bandwidth with external capacitors = 1/(2 × π × 32 kΩ × C). For CX, CY = 0.003 μF, bandwidth = 1.6 kHz. For CZ = 0.01 μF, bandwidth = 500 Hz. For CX, CY, CZ = 10 μF, bandwidth = 0.5 Hz. 6 Self test response changes cubically with VS. 7 Turn-on time is dependent on CX, CY, CZ and is approximately 160 × CX or CY or CZ + 1 ms, where CX, CY, CZ are in μF. Rev. 0 | Page 3 of 16

ADXL326 ABSOLUTE MAXIMUM RATINGS Table 2. Stresses above those listed under Absolute Maximum Ratings Parameter Rating may cause permanent damage to the device. This is a stress Acceleration (Any Axis, Unpowered) 10,000 g rating only; functional operation of the device at these or any Acceleration (Any Axis, Powered) 10,000 g other conditions above those indicated in the operational V −0.3 V to +3.6 V section of this specification is not implied. Exposure to absolute S All Other Pins (COM − 0.3 V) to (V + 0.3 V) maximum rating conditions for extended periods may affect S Output Short-Circuit Duration Indefinite device reliability. (Any Pin to Common) Temperature Range (Powered) −55°C to +125°C ESD CAUTION Temperature Range (Storage) −65°C to +150°C Rev. 0 | Page 4 of 16

ADXL326 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS C S S C N V V N 16 15 14 13 ADXL326 NC 1 12 XOUT TOP VIEW ST 2 (Not to Scale) 11 NC +Y COM 3 +Z 10 YOUT NC 4 +X 9 NC 5 6 7 8 NCOMC = NCOMO COCOMNNEZCOUTT 07948-003 Figure 2. Pin Configuration Table 3. Pin Function Descriptions Pin No. Mnemonic Description 1 NC No Connect (or Optionally Ground) 2 ST Self Test 3 COM Common 4 NC No Connect 5 COM Common 6 COM Common 7 COM Common 8 Z Z Channel Output OUT 9 NC No Connect (or Optionally Ground) 10 Y Y Channel Output OUT 11 NC No Connect 12 X X Channel Output OUT 13 NC No Connect 14 V Supply Voltage (1.8 V to 3.6 V) S 15 V Supply Voltage (1.8 V to 3.6 V) S 16 NC No Connect EP Exposed pad Not internally connected. Solder for mechanical integrity. Rev. 0 | Page 5 of 16

ADXL326 TYPICAL PERFORMANCE CHARACTERISTICS N > 1000 for all typical performance plots, unless otherwise noted. 90 40 80 70 30 %) 60 %) ON ( 50 ON ( ATI ATI 20 UL 40 UL P P O O P 30 P 10 20 10 0 0 1.46 1.47 1.48 1.49OUT1P.U50T (V1).51 1.52 1.53 1.54 07948-005 –62 –60 –58VOLTA–G56E (mV)–54 –52 –50 07948-008 Figure 3. X-Axis Zero g Bias at 25°C, VS = 3 V Figure 6. X-Axis Self Test Response at 25°C, VS = 3 V 100 40 90 80 30 70 %) %) N ( 60 N ( O O ATI 50 ATI 20 UL UL P 40 P O O P P 30 10 20 10 0 0 1.46 1.47 1.48 1.49OUT1P.5U0T (V1).51 1.52 1.53 1.54 07948-006 52 54 56 VO5L8TAGE (6m0V) 62 64 66 07948-009 Figure 4. Y-Axis Zero g Bias at 25°C, VS = 3 V Figure 7. Y-Axis Self Test Response at 25°C, VS = 3 V 80 30 70 60 N (%) 50 N (%) 20 O O ATI 40 ATI UL UL OP 30 OP P P 10 20 10 0 0 1.46 1.47 1.48 1.49OUT1P.5U0T (V1).51 1.52 1.53 1.54 07948-007 90 92 94 VO9L6TAGE (9m8V) 100 102 104 07948-010 Figure 5. Z-Axis Zero g Bias at 25°C, VS = 3 V Figure 8. Z-Axis Self Test Response at 25°C, VS = 3 V Rev. 0 | Page 6 of 16

ADXL326 65 1.53 N = 8 60 55 1.52 50 45 %) TION ( 3450 UT (V) 1.51 LA 30 TP U U OP 25 O 1.50 P 20 15 1.49 10 5 0 1.48 –2.5–2.0–1T.5EM–1P.0ER–0A.T5UR0E C0O.5EFF1I.C0IE1N.5T (m2.g0/°C2).5 3.0 3.5 07948-011 –40–30 –20–10 0 1T0EM2P0ERA30TUR4E0 (°5C0) 60 70 80 90 100 07948-014 Figure 9. X-Axis Zero g Bias Temperature Coefficient, VS = 3 V Figure 12. X-Axis Zero g Bias vs. Temperature, Eight Parts Soldered to PCB 70 1.53 N = 8 60 1.52 50 %) TION ( 40 UT (V) 1.51 A P L T U 30 U P O 1.50 O P 20 1.49 10 0 1.48 –2.5–2.0–1T.5EM–1P.0ER–0A.T5UR0E C0O.5EFF1I.C0IE1N.5T (m2.g0/°C2).5 3.0 3.5 07948-012 –40–30–20–10 0 1T0EM2P0ERA30TUR4E0 (°5C0) 60 70 80 90 100 07948-015 Figure 10. Y-Axis Zero g Bias Temperature Coefficient, VS = 3 V Figure 13. Y-Axis Zero g Bias vs. Temperature, Eight Parts Soldered to PCB 30 1.530 N = 8 1.525 25 1.520 1.515 %) 20 TION ( 15 UT (V)11..550150 A P L T PU OU1.500 O P 10 1.495 1.490 5 1.485 0 1.480 –2.5–2.0–1T.5EM–1P.0ER–0A.T5UR0E C0O.E5FF1I.C0IE1N.T5 (m2.g0/°C2).5 3.0 3.5 07948-013 –40–30–20–10 0 1T0EM2P0ERA30TUR4E0 (°5C0) 60 70 80 90 100 07948-016 Figure 11. Z-Axis Zero g Bias Temperature Coefficient, VS = 3 V Figure 14. Z-Axis Zero g Bias vs. Temperature, Eight Parts Soldered to PCB Rev. 0 | Page 7 of 16

ADXL326 35 N = 8 0.061 30 25 0.059 %) V/g) N ( 20 Y ( TIO VIT0.057 ULA 15 SITI P N PO SE0.055 10 0.053 5 00.053 0.054 0.055 0S.0E5N6SIT0.I0V5IT7Y (0V./0g5)8 0.059 0.060 0.061 07948-017 0.051–40–30–20 –10 0 1T0EM2P0ERA30TUR4E0 (°5C0) 60 70 80 90 100 07948-020 Figure 15. X-Axis Sensitivity at 25°C, VS = 3 V Figure 18. X-Axis Sensitivity vs. Temperature, Eight Parts Soldered to PCB, VS = 3 V 55 N = 8 50 0.061 45 40 0.059 TION (%) 3305 VITY (V/g)0.057 ULA 25 SITI P N PO 20 SE0.055 15 10 0.053 5 0 0.051 0.053 0.054 0.055 0S.0E5N6SIT0.I0V5IT7Y (0V.0/g5)8 0.059 0.060 0.061 07948-018 –40–30–20 –10 0 1T0EM2P0ERA30TUR4E0 (°5C0) 60 70 80 90 100 07948-021 Figure 16. Y-Axis Sensitivity at 25°C, VS = 3 V Figure 19. Y-Axis Sensitivity vs. Temperature, Eight Parts Soldered to PCB, VS = 3 V 40 N = 8 35 0.061 30 0.059 ON (%) 25 TY (V/g)0.057 ULATI 20 SITIVI OP 15 EN0.055 P S 10 0.053 5 0 0.051 0.053 0.054 0.055 0.S0E5N6SI0T.I0V5IT7Y (0V.0/g5)8 0.059 0.060 0.061 07948-019 –40–30–20 –10 0 1T0EM2P0ERA30TUR4E0 (°5C0) 60 70 80 90 100 07948-022 Figure 17. Z-Axis Sensitivity at 25°C, VS = 3 V Figure 20. Z-Axis Sensitivity vs. Temperature, Eight Parts Soldered to PCB, VS = 3 V Rev. 0 | Page 8 of 16

ADXL326 600 500 CH4: ZOUT, 500mV/DIV CH3: YOUT, 500mV/DIV A) 400 CH2: XOUT, 500mV/DIV µ T ( N 300 4 E R R 3 U C 200 2 CH1: POWER, 2V/DIV 100 0 1 OFOURTP CULTASR AITRYE OFFSET 07948-024 1.5 2.0 2.5SUPPLY (V3).0 3.5 4.0 07948-023 TIME (1ms/DIV) Figure 21. Typical Current Consumption vs. Supply Voltage Figure 22. Typical Turn-On Time, VS = 3 V, CX = CY = CZ = 0.0047 μF Rev. 0 | Page 9 of 16

ADXL326 THEORY OF OPERATION The ADXL326 is a complete 3-axis acceleration measurement MECHANICAL SENSOR system. The ADXL326 has a measurement range of ±16 g The ADXL326 uses a single structure for sensing the X, Y, and Z axes. minimum. It contains a polysilicon surface micromachined As a result, the three axes sense directions are highly orthogonal sensor and signal conditioning circuitry to implement an open- with little cross-axis sensitivity. Mechanical misalignment of the loop acceleration measurement architecture. The output signals sensor die to the package is the chief source of cross-axis sensitivity. are analog voltages that are proportional to acceleration. The Mechanical misalignment can, of course, be calibrated out at accelerometer can measure the static acceleration of gravity in the system level. tilt sensing applications, as well as dynamic acceleration, resulting PERFORMANCE from motion, shock, or vibration. Rather than using additional temperature compensation circuitry, The sensor is a polysilicon surface micromachined structure innovative design techniques ensure that high performance is built- built on top of a silicon wafer. Polysilicon springs suspend the in to the ADXL326. As a result, there is neither quantization error structure over the surface of the wafer and provide a resistance nor nonmonotonic behavior, and temperature hysteresis is very against acceleration forces. Deflection of the structure is measured low (typically <3 mg over the −25°C to +70°C temperature range). using a differential capacitor that consists of independent fixed plates and plates attached to the moving mass. The fixed plates are driven by 180° out-of-phase square waves. Acceleration deflects the moving mass and unbalances the differential capacitor resulting in a sensor output whose amplitude is proportional to acceleration. Phase-sensitive demodulation techniques are then used to determine the magnitude and direction of the acceleration. The demodulator output is amplified and brought off-chip through a 32 kΩ resistor. The user then sets the signal bandwidth of the device by adding a capacitor. This filtering improves measurement resolution and helps prevent aliasing. Rev. 0 | Page 10 of 16

ADXL326 APPLICATIONS INFORMATION POWER SUPPLY DECOUPLING DESIGN TRADE-OFFS FOR SELECTING FILTER CHARACTERISTICS: THE NOISE/BW TRADE-OFF For most applications, a single 0.1 μF capacitor, C , placed DC close to the ADXL326 supply pins adequately decouples the The selected accelerometer bandwidth ultimately determines accelerometer from noise on the power supply. However, in the measurement resolution (smallest detectable acceleration). applications where noise is present at the 50 kHz internal clock Filtering can be used to lower the noise floor to improve the frequency (or any harmonic thereof), additional care in power resolution of the accelerometer. Resolution is dependent on the supply bypassing is required because this noise can cause errors analog filter bandwidth at X , Y , and Z . OUT OUT OUT in acceleration measurement. If additional decoupling is needed, a The output of the ADXL326 has a typical bandwidth greater 100 Ω (or smaller) resistor or ferrite bead can be inserted in the than 500 Hz. The user must filter the signal at this point to limit supply line. Additionally, a larger bulk bypass capacitor (1 μF or aliasing errors. The analog bandwidth must be no more than half greater) can be added in parallel to C . Ensure that the connection DC the analog-to-digital sampling frequency to minimize aliasing. from the ADXL326 ground to the power supply ground is low The analog bandwidth can be further decreased to reduce noise impedance because noise transmitted through ground has a and improve resolution. similar effect as noise transmitted through V. S The ADXL326 noise has the characteristics of white Gaussian SETTING THE BANDWIDTH USING C , C , AND C X Y Z noise, which contributes equally at all frequencies and is described The ADXL326 has provisions for band limiting the X , Y , and in terms of μg/√Hz (the noise is proportional to the square root OUT OUT Z pins. Capacitors must be added at these pins to implement of the accelerometer bandwidth). The user should limit bandwidth OUT low-pass filtering for antialiasing and noise reduction. The 3 dB to the lowest frequency needed by the application to maximize bandwidth equation is the resolution and dynamic range of the accelerometer. f = 1/(2π(32 kΩ) × C ) With the single-pole roll-off characteristic, the typical noise of −3 dB (X, Y, Z) the ADXL326 is determined by or more simply rms Noise = Noise Density × ( BW×1.6) f = 5 μF/C –3 dB (X, Y, Z) Often, the peak value of the noise is desired. Peak-to-peak noise The tolerance of the internal resistor (R ) typically varies as FILT can only be estimated by statistical methods. Table 5 is useful for much as ±15% of its nominal value (32 kΩ), and the bandwidth estimating the probabilities of exceeding various peak values, given varies accordingly. A minimum capacitance of 0.0047 μF for C , X the rms value. C , and C is recommended in all cases. Y Z Table 5. Estimation of Peak-to-Peak Noise Table 4. Filter Capacitor Selection, CX, CY, and CZ % of Time That Noise Exceeds Bandwidth (Hz) Capacitor (μF) Peak-to-Peak Value Nominal Peak-to-Peak Value 1 4.7 2 × rms 32 10 0.47 4 × rms 4.6 50 0.10 6 × rms 0.27 100 0.05 8 × rms 0.006 200 0.027 USE WITH OPERATING VOLTAGES OTHER THAN 3 V 500 0.01 The ADXL326 is tested and specified at V = 3 V; however, it can be S SELF TEST powered with VS as low as 1.8 V or as high as 3.6 V. Note that some performance parameters change as the supply voltage is varied. The ST pin controls the self test feature. When this pin is set to V, an electrostatic force is exerted on the accelerometer beam. The ADXL326 output is ratiometric; therefore, the output S The resulting movement of the beam allows the user to test sensitivity (or scale factor) varies proportionally to the supply whether the accelerometer is functional. The typical change in voltage. At VS = 3.6 V, the output sensitivity is typically 68 mV/g. output is −1.08 g (corresponding to −62 mV) in the X axis, +1.08 g At VS = 2 V, the output sensitivity is typically 38 mV/g. (+62 mV) on the Y axis, and +1.83 g (+105 mV) on the Z axis. The zero g bias output is also ratiometric; therefore, the zero g This ST pin can be left open circuit or connected to common output is nominally equal to V/2 at all supply voltages. S (COM) in normal use. The output noise is not ratiometric but is absolute in volts; Never expose the ST pin to voltages greater than VS + 0.3 V. If therefore, the noise density decreases as the supply voltage this cannot be guaranteed due to the system design (for instance, increases. This is because the scale factor (mV/g) increases while there are multiple supply voltages), then a low VF clamping the noise voltage remains constant. At VS = 3.6 V, the X- and Y- diode between ST and VS is recommended. axis noise density is typically 120 μg/√Hz, while at VS = 2 V, the X- and Y-axis noise density is typically 270 μg/√Hz. Rev. 0 | Page 11 of 16

ADXL326 Self test response in g is roughly proportional to the square of AXES OF ACCELERATION SENSITIVITY the supply voltage. However, when ratiometricity of sensitivity AZ is factored in with supply voltage, the self test response in volts is roughly proportional to the cube of the supply voltage. For example, at V = 3.6 V, the self test response for the S ADXL326 is approximately −107 mV for the X axis, +107 mV AY for the Y axis, and +181 mV for the Z axis. At V = 2 V, the self S test response is approximately −18 mV for the X axis, +18 mV for the Y axis, and −31 mV for the Z axis. The supply current decreases as the supply voltage decreases. TOP Typical current consumption at V = 3.6 V is 375 μA, and S typical current consumption at V = 2 V is 200 μA. S AX 07948-025 Figure 23. Axes of Acceleration Sensitivity (Corresponding Output Voltage Increases When Accelerated Along the Sensitive Axis) XOUT = –1g YOUT = 0g ZOUT = 0g TOP GRAVITY XOUT = 0g XOUT = 0g YOUT = 1g TOP TOP YOUT = –1g ZOUT = 0g ZOUT = 0g TOP XOUT = 1g YOUT = 0g ZOUT = 0g TOP XYZOOOUUUTTT === 100ggg XYZOOOUUUTTT === –001ggg 07948-026 Figure 24. Output Response vs. Orientation to Gravity Rev. 0 | Page 12 of 16

ADXL326 LAYOUT AND DESIGN RECOMMENDATIONS The recommended soldering profile is shown in Figure 25, followed by a description of the profile features in Table 6. The recommended PCB layout or solder land drawing is shown in Figure 26. CRITICAL ZONE TP tP TL TO TP RAMP-UP URETL TSMAX tL T A ER TSMIN P M E T t PREHSEAT RAMP-DOWN t25°C TO PEAK TIME 07948-002 Figure 25. Recommended Soldering Profile Table 6. Recommended Soldering Profile Profile Feature Sn63/Pb37 Pb-Free Average Ramp Rate (T to T) 3°C/sec maximum 3°C/sec maximum L P Preheat Minimum Temperature (T ) 100°C 150°C SMIN Maximum Temperature (T ) 150°C 200°C SMAX Time (T to T ), t 60 sec to 120 sec 60 sec to 180 sec SMIN SMAX S T to T SMAX L Ramp-Up Rate 3°C/sec maximum 3°C/sec maximum Time Maintained Above Liquidous (T) L Liquidous Temperature (T) 183°C 217°C L Time (t) 60 sec to 150 sec 60 sec to 150 sec L Peak Temperature (T) 240°C + 0°C/−5°C 260°C + 0°C/−5°C P Time Within 5°C of Actual Peak Temperature (t) 10 sec to 30 sec 20 sec to 40 sec P Ramp-Down Rate 6°C/sec maximum 6°C/sec maximum Time 25°C to Peak Temperature 6 minutes maximum 8 minutes maximum 0.50 4 MAX 0.65 0.325 0.35 MAX 0.65 4 1.95 0.325 CENTER PAD IS NOT INTERNALLY CONNECTED BUT SHOULD BE SOLDERED FOR MECHANICAL INTEGRITY 1.95 DIMENSIONS SHOWN IN MILLIMETERS 07948-004 Figure 26. Recommended PCB Layout Rev. 0 | Page 13 of 16

ADXL326 OUTLINE DIMENSIONS 0.20 MIN PIN 1 0.20 MIN INDICATOR 13 16 PIN 1 INDICATOR 4.15 12 EXPOSED 1 2.43 TOP VIEW 4.00 SQ PAD 1.75 SQ 3.85 0.65 BSC (BOTTOM VIEW) 1.08 9 4 8 5 0.55 0.50 0.45 1.95BSC 0.05 MAX FOR PROPER CONNECTION OF 1.50 0.02 NOM THE EXPOSED PAD, REFER TO 11..4450 SEATING 00..3350 COPL0A.0N5ARITY TFSHUECEN TCPITOINION C NOO DFN ETFSIHGCISUR RIDPAATTTIOIAON NSS HAENEDT. PLANE 0.25*STACKED DIE WITH GLASS SEAL. 112008-A Figure 27. 16-Lead Lead Frame Chip Scale Package [LFCSP_LQ] 4 mm × 4 mm Body, 1.45 mm Thick Quad (CP-16-5a*) Dimensions shown in millimeters ORDERING GUIDE Model Measurement Range Specified Voltage Temperature Range Package Description Package Option ADXL326BCPZ1 ±16 g 3 V −40°C to +85°C 16-Lead LFCSP_LQ CP-16-5a ADXL326BCPZ–RL1 ±16 g 3 V −40°C to +85°C 16-Lead LFCSP_LQ CP-16-5a ADXL326BCPZ–RL71 ±16 g 3 V −40°C to +85°C 16-Lead LFCSP_LQ CP-16-5a EVAL-ADXL326Z1 Evaluation Board 1 Z = RoHS Compliant Part. Rev. 0 | Page 14 of 16

ADXL326 NOTES Rev. 0 | Page 15 of 16

ADXL326 NOTES Analog Devices offers specific products designated for automotive applications; please consult your local Analog Devices sales representative for details. Standard products sold by Analog Devices are not designed, intended, or approved for use in life support, implantable medical devices, transportation, nuclear, safety, or other equipment where malfunction of the product can reasonably be expected to result in personal injury, death, severe property damage, or severe environmental harm. Buyer uses or sells standard products for use in the above critical applications at Buyer's own risk and Buyer agrees to defend, indemnify, and hold harmless Analog Devices from any and all damages, claims, suits, or expenses resulting from such unintended use. ©2009 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D07948-0-8/09(0) Rev. 0 | Page 16 of 16

Mouser Electronics Authorized Distributor Click to View Pricing, Inventory, Delivery & Lifecycle Information: A nalog Devices Inc.: EVAL-ADXL326Z ADXL326BCPZ ADXL326BCPZ-RL7 ADXL326BCPZ-RL